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V1X

小型窒素ガス発生装置


V1X:Compact Nitrogen Gas Generator

Product Features

High purity nitrogen gas generator with a compact non-turbine design complying with non-CFC and having an integral mechanical room unit with a distillation column, condenser, heat exchanger and CE (cold evaporator) installed in the outer tank.

Applicatiions

On-site gas supply for the manufacture of, liquid crystals, plasma displays, semiconductors, and solar cells, etc.

Specifications

Model Nitrogen gas
Capacity(Nm3/hr) 150~2350
Purity(%) 99.999

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