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VSS-GC

シリンダーキャビネット


VSS-GC:Cylinder Cabinet

Product Features

VSS-GC cylinder cabinets have been developed to achieve fully-automated systems for safe and stable supply through an automatic verification system of the open-close status of the container valve. The technology reduces the number of the joints by minimizing the internal volume of the piping and realizes a high purification level by using vacuum generators to assist in the purging of the piping.

Applicatiions

Specialty gas supply unit for the manufacture of semiconductors, liquid crystals, and solar batteries

Specifications

VSS-GC① No. of material gas containers (1–6)
VSS-GC② Supply lines (1 or 2)
VSS-GC③ O:Tightly sealed high pressure vessel without a purge vessel
H:Tightly sealed high pressure vessel
N:Tightly sealed high pressure vessel with a purge vessel
VSS-GC④ A:Non-polishing piping
S:Grinding piping
US:Grinding piping + block valve
VSS-GC⑤ No mark: Stainless steel
C: HASTELLOY

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