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VSS-VMB

バルブマニホールドボックス


VSS-VMB:Valve Manifold Box

Product Features

Valve manifold box enables the supply of specialty gases to be branched off to respective production facilities of semiconductors, liquid crystals, and solar cells. Incorporation of the design concept of the VSS-GC makes this unit compact with improved performance. Safety is ensured by full automation; excellent maneuverability is achieved by the operator interface on the display panel.

Applicatiions

Specialty gas branch supply box for the manufacture of semiconductors, liquid crystals, and solar cells

Specifications

One process gas line is branched into 2–5 lines, each corresponding to a special gas property such as high purity toxicity, combustibility (pyrophoricity), combustion-enhancing, and corrosive nature. Manufacturing is tailor-made to satisfy each customer.

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