APPLICATION TECHNOLOGY
LOW TEMPERATURE / LNG
SEMIMCONDUCTOR
INDUSTRY
GASAtmospheric pressure plasma remote type surface treatment device
Applicatiions
Washing of fine circuit substrates, glass, materials for cells, etc.
Product Features
Surface modification and washing for glass and circuit substrates, etc.
The equipment for spraying inexpensive nitrogen gas (N2) plasma onto a surface is a very easy-to-use system for inline operation and high-speed washing, with no maintenance required.
Allows for plasma treatment inside the gaps of a very fine circuit, effective for pre-etching process and wettability improvement.
The equipment for spraying inexpensive nitrogen gas (N2) plasma onto a surface is a very easy-to-use system for inline operation and high-speed washing, with no maintenance required.
Allows for plasma treatment inside the gaps of a very fine circuit, effective for pre-etching process and wettability improvement.
Specifications
| Plasma irradiation width | 200mm | 400mm | 600mm | 800mm |
|---|---|---|---|---|
| Power requirements | 2kW | 4kW | 6kW | 8kW |
| Process gas | Nitrogen + Oxygen, Nitrogen + dry air, Other gas addition possible | |||